| 摘要 |
PROBLEM TO BE SOLVED: To provide a formation method of forming a diffusion prevention film at a low cost. SOLUTION: This layered product 1 with a diffusion prevention film includes the diffusion prevention film 5 on a glass substrate 3; and electrodes 7a, 7b, 7c, 7d and 7e are formed on the diffusion prevention film 5. A dielectric layer 9 is formed on the electrodes 7a, 7b, 7c, 7d and 7e and on the diffusion prevention film 5. The diffusion prevention film 5 is formed between the glass substrate 3, and the electrodes 7a, 7b, 7c, 7d and 7e and the dielectric layer 9; and diffusion is prevented from occurring between the glass substrate 3 and the electrodes 7a, 7b, 7c, 7d and 7e and between the glass substrate 3 and the dielectric layer 9. The diffusion prevention film 5 is applied by using a method such as a spin coat method, a slit coat method, a spray coat method, a dip coat method, a slit spin coat method or a spray spin coat method. COPYRIGHT: (C)2007,JPO&INPIT
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