| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal inspection device capable of efficiently inspecting an inspection object. SOLUTION: The confocal inspection device comprises: an objective optical system 5 disposed facing an inspection object 2; a light projecting part 10 for projecting bright spot light 10a to the inspection object 2 through the objective optical system 5; a two-dimensional scanning system 20 for two-dimensionally scanning the inspection object 2 with the bright spot light 10a; an imaging optical system 6 for forming an image of the projected bright spot light 10a returning from the inspection object 2 through the objective optical system 5; a first light receiving part 40 for receiving light through the imaging optical system 6; a diaphragm part 41 for converging the light to be received by the first light receiving part 40; a light splitting means 32 disposed in an optical path extending from the inspection object 2 to the first light receiving part 40; and a focus detection optical system 110 disposed in the split optical path obtained by the light splitting means 32, such that displacement in the direction of the optical axis extending from the focal point of the objective optical system 5 for the inspection object 2 is detected between a position in front of the focal point of the objective optical system 5 and a position behind the focal point of the objective optical system 5. COPYRIGHT: (C)2007,JPO&INPIT |
