| 摘要 |
An apparatus for manufacturing a flat panel display is provided to reduce reaction against a substrate by supplying a substrate processing solution in a direction parallel to a substrate. A substrate treatment liquid is stored in a substrate treatment bath(100), and a substrate(G) horizontally sinks in the substrate treatment bath. A supply unit(200) is disposed in the substrate treatment bath in a direction parallel to the substrate and spouts the substrate treatment liquid in a direction parallel to the substrate. The supply unit has a shape of a branch pipe including a bar-shaped pipe and a plurality of flow paths at both sides of the pipe. The diameter of the flow path for spouting the substrate treatment liquid is smaller than the diameter of the pipe which is a supply passage for the substrate treatment liquid. |
