发明名称 |
Method of Determining the Depth Profile of a Surface Structure and System for Determining the Depth Profile of a Surface Structure |
摘要 |
According to one embodiment of the present invention, a method of determining the depth profile of a surface structure includes: irradiating the surface structure with irradiation light including light components of different wavelengths; and determining the depth profile of the surface structure in dependence on interferometric effects caused by the reflection of the irradiation light at the surface structure.
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申请公布号 |
US2009059239(A1) |
申请公布日期 |
2009.03.05 |
申请号 |
US20070847830 |
申请日期 |
2007.08.30 |
申请人 |
HOFFMANN FRANK;VOIGTLAENDER KNUT |
发明人 |
HOFFMANN FRANK;VOIGTLAENDER KNUT |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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