发明名称 COMPOUND SEMICONDUCTOR LAMINATE, PROCESS FOR PRODUCING THE COMPOUND SEMICONDUCTOR LAMINATE, AND SEMICONDUCTOR DEVICE
摘要 <p>The present invention relates to a compound semiconductor lamination that enables an InSb film to be formed on an Si substrate and enables development of applications to magnetic sensors, such as Hall elements, magnetoresistance elements, etc., optical devices, such as infrared sensors, etc., and electronic devices, such as transistors, etc., to be provided industrially, and a method for manufacturing the compound semiconductor lamination. An active layer (2), which is a compound semiconductor that does not contain As, is directly formed on an Si substrate (1). As is present at an interface of the active layer (2) and a single crystal layer of the Si substrate (1). The compound semiconductor contains at least nitrogen. The compound semiconductor is a single crystal thin film. The Si substrate (1) is a bulk single crystal substrate or a thin film substrate with an uppermost layer being Si.</p>
申请公布号 EP2131398(A1) 申请公布日期 2009.12.09
申请号 EP20080738698 申请日期 2008.03.21
申请人 ASAHI KASEI EMD CORPORATION 发明人 SHIBATA, YOSHIHIKO;MIYAHARA, MASATOSHI
分类号 H01L29/26;C30B23/02;C30B25/18;C30B29/40;H01L21/20;H01L29/20;H01L43/06;H01L43/08 主分类号 H01L29/26
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