| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-performance reflection type X-ray generation apparatus.SOLUTION: A reflection type X-ray generation apparatus includes a cylindrical vacuum vessel, a case unit 41 covering the side face of the vacuum vessel and a head 10 attached to the case unit 41. The case unit 41 includes a planar end section 41a for fixing the head and an inclined surface 35 having a shape of a side face of an approximately circular truncated cone. The head 10 is projected up to a position separated from the end section 41a further more than a curved surface PL constituting the inclined surface 35. The head 10 includes plane surfaces 10b, 10c inclined from a plane surface constituting the end section 41a and a window 12 for guiding X-rays generated in the vacuum vessel to an object. The window 12 faces the plane surface 10b and does not face the plane surface 10c.SELECTED DRAWING: Figure 2 |
