发明名称 Nanotube and metal composite interconnects
摘要 Nanotube and metal composite interconnects are generally described. In one example, an apparatus includes an interlayer dielectric (ILD) and one or more interconnect structures coupled to the ILD, the one or more interconnect structures including a composite of metal and one or more nanotubes.
申请公布号 US7843070(B2) 申请公布日期 2010.11.30
申请号 US20080034635 申请日期 2008.02.20
申请人 INTEL CORPORATION 发明人 O'BRIEN KEVIN P.
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项
地址