| 发明名称 |
Method and apparatus for depositing LED organic film |
| 摘要 |
In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle. |
| 申请公布号 |
US9385322(B2) |
申请公布日期 |
2016.07.05 |
| 申请号 |
US201113095619 |
申请日期 |
2011.04.27 |
| 申请人 |
Massachusetts Institute of Technology |
发明人 |
Bulovic Vladimir;Baldo Marc A.;Schmidt Martin A.;Gassend Valerie;Chen Jianglong |
| 分类号 |
C23C16/00;H01L51/00;C23C16/448;C23C16/455;C23C16/04;B05D1/12;H01L51/56 |
主分类号 |
C23C16/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for depositing a layer of substantially solvent-free organic material on a substrate, comprising:
heating the organic material to form a plurality of suspended organic particles; delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores for receiving the suspended organic particles; processing the suspended organic particles through the plurality of micro-pores to substantially block a portion of the suspended organic particles; and energizing the discharge nozzle to pulsatingly eject the suspended organic particles from the plurality of micro-pores onto the substrate. |
| 地址 |
Cambridge CA US |
