VOID-ARRANGED STRUCTURE AND MEASUREMENT METHOD USING SAME

摘要

The present invention is an aperture array structure used in a method of measuring characteristics of a specimen by applying an electromagnetic wave to an aperture array structure on which the specimen is held, and detecting frequency characteristics of the electromagnetic wave scattered by the aperture array structure. The aperture array structure includes a first principal surface, a second principal surface opposed to the first principal surface, and a plurality of apertures extending through the aperture array structure in a direction perpendicular to the first principal surface and the second principal surface. An opening area of each aperture at the first principal surface is smaller than an opening area of each aperture at the second principal surface.