| 摘要 |
PROBLEM TO BE SOLVED: To promptly exchange objects on an object support apparatus.SOLUTION: On a +X side of a first air levitation unit 69 for supporting a substrate Pa of a carrying-out target, a second air levitation unit 70 for supporting a substrate Pb of a carrying-in target is disposed. Downward the second air levitation unit 70, a third air levitation unit 75 is disposed with inclination to a θy direction. The first air levitation unit 69 is inclined to the θy direction to fit to the third air levitation unit 75, the substrate Pa is conveyed from the first air levitation unit 69 to the third air levitation unit 75, and thereafter, the first air levitation unit 69 is made horizontal, so that the substrate Pb is conveyed from the second air levitation unit 70 to the first air levitation unit 69. In short, a substrate carrying-in route and a carrying-out route relative to the first air levitation unit 69 are different. Thus, the substrate on the first air levitation unit 69 can be exchanged promptly.SELECTED DRAWING: Figure 9 |
