摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluoride crystal which emits high luminance in a vacuum ultraviolet region, a novel vacuum ultraviolet light emitting element comprising the fluoride crystal and favorably usable for photolithography, cleaning of substrates of semiconductors and liquid crystals, sterilization, next-generation high-capacity optical discs, medical treatment (ophthalmologic treatment, DNA cutting), and the like, and a vacuum ultraviolet light emitting scintillator favorably usable for a small sized radioactive ray detector mounted with a diamond light receiving element or an AlGaN light receiving element having low background noises as a substitute of a conventional photomultiplier tube. <P>SOLUTION: There are provided a fluoride crystal comprising a mixed phase of K<SB>3</SB>LuF<SB>6</SB>and KF, and a vacuum ultraviolet emitting element and a vacuum ultraviolet emitting scintillator comprising the fluoride crystal. <P>COPYRIGHT: (C)2011,JPO&INPIT |