SEMICONDUCTOR SUBSTRATE WITH PASSIVATION LAYER AND ITS MANUFACTURING METHOD, SOLAR CELL ELEMENT USING THE SAME AND ITS MANUFACTURING METHOD, AND SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor substrate with a passivation film including a passivation layer whose film quality is excellent and which is excellent in patternability and passivation effect, and also to provide a method of manufacturing the semiconductor substrate with the passivation film, a solar cell element having excellent conversion efficiency and obtained by using the same, its manufacturing method, and a solar cell.SOLUTION: A semiconductor substrate with a passivation layer includes a passivation layer 5 obtained by imparting a metal compound of 0.8-18.0 mg per 100 cmto the whole area or a part on the semiconductor substrate and applying heat treatment thereto. The metal compound contains a compound represented by the following general formula (I) and water.SELECTED DRAWING: Figure 1