| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS device with a monolithic structure that can specify the behavior of an MEMS element accurately.SOLUTION: An MEMS device 13b includes: a substrate 14; an integrated circuit 15 formed on the substrate 14 and having at least three electrodes 16; and an MEMS element 18 formed on the substrate 14, in a first region 17 and in a second region 19, the first region maximally divided by a straight line which connects the electrodes 16 together in the planar view and is circumscribed with the electrodes 16 and the second region 19 being divided between edges 21 of the substrate 14.SELECTED DRAWING: Figure 2 |
