| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a precision machinery component which can form a highly precise opening, and a grid plate for permeation encoder that a highly precise slit is formed.SOLUTION: A manufacturing method of a precision machinery component includes: a resist coating step applying resist 2 and 3 to a face side and a back side of a copper layer 1; an exposure and develop step forming first resist pattern 4 on the face side of the copper layer 1 and forming second resist pattern 5 on the back side of the copper layer 1 by exposing and developing the resist 2 and 3 corresponding to an opening position forming an opening 10 and removing the resist 2 and 3 corresponding to a non-opening position which does not form the opening 10; a double sided Ni plating step forming nickel layers 6 and 7 by electrolysis plating on the face side and the back side; a resist peeling step removing the first resist pattern 4 and the second resist pattern 5; and an etch step forming the opening 10 by etching the exposed copper layer 1.SELECTED DRAWING: Figure 1 |
