| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryogenic temperature cooling device and a cryogenic temperature cooling method capable of suppressing a cooled body, cooled by a plurality of cooling systems, from having thermal stress and also efficiently pre-cooling it.SOLUTION: A cryogenic temperature cooling device 10 comprises: cooling piping 19 providing cooling systems by forming a circulation path for a refrigerant to be supplied to a cooled body 11 arranged in a vacuum container 13; a freezer 15 having cold sources for cooling the refrigerant and having the cooling piping 19 connected annularly; pre-cooling pipings 22a, 22b constituting part of at least one cooling piping 19 among a plurality of cooling systems, and also branching the cooling piping 19 annularly to bypass a specific cold source; a bypass valve 29 provided to the pre-cooling pipings 22a, 22b and changing the cold sources for the refrigerant to be supplied to the cooled body 11; and a supply heat exchanger 33 provided in a section, from branch points by the pre-cooling pipings 22a, 22b to the cooled body 11, of the cooling piping 19, and connected to cooling piping 19 of a different cooling system from the cooling piping 19.SELECTED DRAWING: Figure 1 |
