| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for storing and dispensing compressed gas to be used for such an application as manufacturing of semiconductor products. <P>SOLUTION: The gas storage and dispensing system (100) includes a vessel (102) for holding gas at a desired pressure. The vessel (102) has a gas pressure regulator (132) in its interior volume, to maintain pressure of dispensed gas at a desired pressure determined by a set value of the regulator (132). A second gas pressure regulator (260) may be joined in series to a first gas pressure regulator (242) to enable gas flow communications. At this time, before passing through the first gas pressure regulator (242), the dispensed gas is made to enter the second gas pressure regulator (260) first, and the pressure set value of the second gas pressure regulator (260) is set at least twice the pressure set value of the first gas pressure regulator (242). <P>COPYRIGHT: (C)2011,JPO&INPIT |
