| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for plasma treatment by which waste gas of fluorine compounds can easily be decomposed in a large amount. SOLUTION: In the method for decomposing waste gas, the fluorine compound gas is decomposed by plasma produced by disposing a solid dielectric material on at least one of the opposing faces of a pair of electrodes facing each other under pressure near the atmospheric pressure and then by applying a pulsed electric field between the pair of electrodes facing each other. |
