MICRO STRUCTURAL BODY, MICROMECHANICAL SENSOR, MICROACTUATOR, MICROOPTICAL POLARISCOPE, OPTICAL SCANNING DISPLAY AND MANUFACRURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a micro structural body having an oscillating element which is vibration freely supported by a torsion spring that is comparatively easy to twist and difficult to bend in a direction that makes an angle for the axis of twist. SOLUTION: The microstructure has a substrate 120 and at least one oscillating element 130. The oscillating element is elastically and oscillation freely supported by at least one of torsion springs 122 and 124 for the substrate 120. The torsion springs 122 and 124, in which the cross-sectional shape of a plane perpendicular to the long axis of the spring is rotational symmetry, composed of a combination of substantially flat shape parts which are so placed that the most flexible direction may cross.