| 摘要 |
PROBLEM TO BE SOLVED: To easily miniaturize and thin a shield member. SOLUTION: A frame 2 has an upside opening having a marginal frame wall 3 surrounding a region to be shielded, and forms a shield member with a shield cover combined with the frame 2 in the form of closing the upside opening. A vacuum pad 6 to be vacuumed to a frame carrying vacuum nozzle is disposed in the upside opening of the frame 2 such that it is supported and fixed to the marginal frame wall 3 with a beam 7. The vacuum pad 6 is disposed above the upper end of the marginal frame wall 3. In a step of mounting the shield member on the region to be shielded, the end of the beam 7 at the marginal frame wall 3 is cut off the frame wall 3 to cut the vacuum pad 6 and the beam 7 from the marginal frame wall 3, after carrying the frame 2 to the region to be shielded, utilizing the vacuum nozzle. Then the shield cover is combined with the frame 2 in the form of closing the upside opening from which the pad 6 and the beam 7 have been removed. COPYRIGHT: (C)2007,JPO&INPIT
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