| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate/speed-up detection of defects on a surface such as a dielectric layer coated surface of a PDP, to alleviate a burden on an inspector, and to shorten the time, etc. Ž<P>SOLUTION: This substrate surface defect detector includes a light source of a unidirectionally long shape, and a transparent plate transmitting the light outputted from the light source. The light source is disposed outside one end face of a substrate which is an inspection object. The transparent plate is disposed outside the end face, in the vicinity thereof, and between the substrate and the light source so as to provide a positional relation in which the front surface of the substrate is orthogonal to the front surface of the transparent plate. The transparent plate includes the front surface which constitutes an uneven surface, having unidirectionally long uneven patterns arranged at a certain periodicity, and a rear surface constituting a flat plane. The transparent plate is disposed so that its uneven surface faces the light source and its flat plane faces to the substrate. This defect detector includes a position adjustment part for adjusting the relative positional relations among the light source, the transparent plate, and the substrate, so that the light outputted from the light source is transmitted from the uneven surface of the transparent plate to the flat plane side, and then applied to the front surface of the substrate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
