| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image measuring apparatus capable of accurately measuring an object to be measured while effectively reducing influence to measuring due to foreign matter such as dust or scratches on a stage on which the object to be measured is placed, and to provide a computer program. Ž<P>SOLUTION: The image measuring apparatus includes a display means 332 for displaying an image obtained by imaging by means of an image capturing device, a timing setting acceptance means 336 for accepting setting of a predetermined timing for acquiring image data, a first detection means 333 for detecting positional information of a foreign object except an object to be measured on the basis of the image data of the image obtained under a non-placement condition that an object to be measured is not placed on the stage, a second detection means 334 for detecting positional information of a foreign object on the basis of image data of an image obtained at a predetermined timing under the non-placement condition or a placement condition that the object to be measured is placed on the stage, and a selection acceptance means for accepting selection of the first detection means 333 or the second detection means 334. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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