发明名称 吸着テーブルの製造方法並びに吸着テーブル
摘要 The present invention provides a method for manufacturing a porous ceramic absorption table in which a cushion material is fitted and an absorption table manufactured by the method. The present invention comprises: a step of processing a lower groove (1b') on the underside of a porous ceramic upper plate (1) as a looped curve shape; a step of penetrating a penetrated groove (1b") with a narrower width than the lower groove (1b') from the top of the upper plate (1) to the lower groove as a reversed T-shaped groove (1b) and dividing the upper plate (1) into a frame member (1c) and a center member (1d) to be an absorption area; a step of coating the inner surface of the frame member (1c) and the outer surface of the center member (1d) with a nonpermeable coating material; and a step of bonding the upper plate (1) and an intermediate plate (2) after the center member (1d) is positioned at the center of the frame member (1c) by an attachment jig (9) by placing the upper plate on the top of an intermediate plate (2) in a state where the center member (1d) of the upper plate (1) is fitted in the frame member (1c).
申请公布号 JP5961064(B2) 申请公布日期 2016.08.02
申请号 JP20120170131 申请日期 2012.07.31
申请人 三星ダイヤモンド工業株式会社 发明人 岡島 康智;三谷 卓朗;林 将圭
分类号 B23Q3/08 主分类号 B23Q3/08
代理机构 代理人
主权项
地址