发明名称 半導体デバイスの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device covered by a silicone resin composition.SOLUTION: A method of manufacturing a semiconductor device covered by a silicone resin composition includes the steps of: microfiltrating a silicone resin composition composed of the following components (A) to (E) by a filter having a hole diameter of 0.2 μm or less, (A) a silicone resin RRR(OX)SiO(1) which includes at least two alkenyl groups in one molecule and is a solid at room temperature (B) a silicone resin RRH(OX)SiO(2) which has at least one hydrogen that is bonded to a silicon atom in one molecule and is a solid at room temperature, (C) an addition reaction catalyst, (D) an adhesion imparting agent, and (E) an organic solvent; coating the semiconductor device with the composition; forming a film of the silicone resin by volatilizing the organic solvent by heating; and forming a cured film by curing the silicone resin composition by heating.
申请公布号 JP5960613(B2) 申请公布日期 2016.08.02
申请号 JP20130000252 申请日期 2013.01.04
申请人 信越化学工業株式会社 发明人 浜本 佳英;柏木 努
分类号 H01L21/312;H01L33/52 主分类号 H01L21/312
代理机构 代理人
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