| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal seal that endures high temperature and can be used as it is (in place of a conventional seal material) without machining a groove in flanges of a pipe connection part of a vacuum device or a semiconductor manufacturing device.SOLUTION: A metal seal comprises a U-shaped seal part 3 for sealing a gap between two planes 5 and 6 parallel to each other. Bulge parts 4 and 4 are formed by protruding a bottom wall part 3A of the U-shaped seal part 3 in both thickness directions, and outer peripheral surfaces 4A and 4A of the bulge parts 4 and 4 constitute a guide part G for centering.SELECTED DRAWING: Figure 3 |
