发明名称 CATHODE ASSEMBLY FOR INDIRECTLY HEATED CATHODE ION SOURCE
摘要 <p>A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the cathode is supported by a single rod at or near its center. The support rod may be held by a spring-action clamp for simple and reliable clamping and unclamping. The disk shaped cathode and the support rod may be fabricated as a single piece. A filament that emits electrons thermionically may be disposed around the rod in close proximity to the cathode.</p>
申请公布号 WO2001088946(A1) 申请公布日期 2001.11.22
申请号 US2001013236 申请日期 2001.04.25
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