THERMAL TYPE AIR FLOWMETER

摘要

PROBLEM TO BE SOLVED: To enhance sensitivity in air flow measurement, to reduce an electric power consumption for a heating element, and to widen a measuring range.

SOLUTION: A heating resistor 4 is formed at an insulation film 6 in a heat insulating area 2 of a rectangular space constituted in a planar substrate (silicon substrate) 1, and two temperature measuring resistors are formed in an upstream and an downstream of the resistor 4. The heat insulating area 2 of the rectangular space is constituted to make lengths along an axial-direction of an air flow and a parallel side larger than that along a vertical side.

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