Specimen testing device, e.g. for semiconductor, has measuring device, which guides measuring head over diaphragm for low attenuating and reflection-free injecting of scanning medium into specimen, for scanning specimen

摘要

Specimen testing device has a waterproof diaphragm (11) which can be applied barrier-free on the scanning surface of the specimen (1). A measuring device (6) is provided for gapless guiding of measuring head (7) over the diaphragm for low attenuating and reflection-free injecting of scanning medium into the specimen, for scanning the specimen. An independent claim is also included for a specimen testing method.