Substrate e.g. glass substrate, thinning device, has determining unit finding thinning period value based on sensor unit`s output value, thickness target value and auxiliary value specified based on difference in output and target values

摘要

The device has a sensor unit (26) to detect thickness of a substrate thinned by a etching chamber. A determining unit (31) automatically determines a thinning period value based on the output value of the unit (26), a specified value of the thickness and an auxiliary value, which is specified based on a difference in the output and specified values and its actual value. A control unit operates the unit (26) based on the period value. An independent claim is also included for a method for thinning a substrate.