| 摘要 |
PROBLEM TO BE SOLVED: To provide a microelectromechanical element array apparatus operated at high speed. SOLUTION: The microelectromechanical element array apparatus is provided with an element array on which elements are arranged one-dimensionally or two-dimensionally, the elements comprising: a movable part 21 which is supported so that it can be elastically displaced and has a movable electrode (not shown in Figure) at least at a part; and a plurality of fixed electrodes 23 and 24 which are arranged facing the movable part 21 and carry out displacement of the movable part 21 into either one of at least two different positions. Holding electrodes 25 and 26 are provided to the fixed electrodes 23 and 24, and the position state of the movable part 21 is localized by applying a holding voltage to the holding electrodes 25 and 26 before address voltage to be applied to the fixed electrodes 23 and 24 is rewritten. Thus, the position state of the movable part 21 is not varied even when the address voltage is rewritten during the time when the movable part 21 is oscillated, rewrite timing of the address voltage can be accelerated, and a high speed operation is made possible. COPYRIGHT: (C)2007,JPO&INPIT
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