Waveguide Type Optical Control Element and Process for Its Fabrication

摘要

A waveguide type optical control element which has an optical waveguide made of an insulating material having an electro-optic effect or a thermo-optic effect, and a control electrode provided in contact with or proximity to the optical waveguide; the optical waveguide having a propagation loss which is 1 dB/cm or less at wavelengths of from 1.3 mum to 1.6 mum. The control electrode is constituted of a conductive oxide film having a carrier electron concentration of 5.5x10²⁰/cm³ or less and a resistivity of 9.5x10^-4 Omegacm or less, and the conductive oxide film has a coefficient of extinction of light waves, of 0.240 or less at a wavelength of 1.55 mum.