发明名称 FABRICATION METHODS OF A PATTERNED SAPPHIRE SUBSTRATE AND A LIGHT-EMITTING DIODE
摘要 A fabricating method for patterned sapphire substrate is provided. The fabricating method includes the following processes. First, a sapphire substrate is provided, and a mask layer is formed on the sapphire substrate, wherein the mask layer with appropriate pattern exposes a part of the sapphire substrate. Then, a wet etching process is performed to remove the exposed part of the sapphire substrate, wherein an etchant in the wet etching process includes sulfuric acid and the mixture of the sulfuric acid and the phosphoric acid. Next, the mask layer is removed to form the patterned sapphire substrate. Further, a fabricating method for light-emitting diode is provided.
申请公布号 US2008070413(A1) 申请公布日期 2008.03.20
申请号 US20060608250 申请日期 2006.12.08
申请人 NATIONAL CENTRAL UNIVERSITY 发明人 CHEN JYH-CHEN;WU LI-YUN;LIU CHE-MING;LEE YEEU-CHANG
分类号 H01L21/311;H01L33/32 主分类号 H01L21/311
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