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发明名称
ABGEWINKELTER SENSOR ZUR DETEKTION EINES SUBSTRATES
摘要
申请公布号
DE60322899(D1)
申请公布日期
2008.09.25
申请号
DE2003622899
申请日期
2003.06.20
申请人
APPLIED MATERIALS INC.
发明人
KURITA, SHINICHI
分类号
H01L21/00;H01L21/67;H01L21/02;H01L21/68
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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