发明名称 |
MEMS ACTUATORS AND SWITCHES |
摘要 |
The microelectromechanical (MEMS) switches employ movable actuators where in one can move perpendicular to an underlying substrate and one or more oth ers can move in a direction substantially parallel to the underlying substra te. Methods of operating MEMS switches are also disclosed. The improvements can enhance the performance of MEMS switches and/or reduce their manufacturi ng costs.
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申请公布号 |
CA2679219(A1) |
申请公布日期 |
2008.09.25 |
申请号 |
CA20082679219 |
申请日期 |
2008.03.17 |
申请人 |
SIMPLER NETWORKS, INC. |
发明人 |
LU, JUN;MENARD, STEPHANE;GONON, NICOLAS |
分类号 |
H01H3/00;B81B3/00;B81B5/00;B81B7/02;H01H3/02 |
主分类号 |
H01H3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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