METHOD OF INSPECTING AN OBJECT WITH A CAMERA PROBE

摘要

A method of inspecting an object with a camera probe for capturing an image of an object, the camera probe being movable along a path by a measurement apparatus, at least a part of the camera probe being rotatable about at least one axis. The method includes: a) the measurement apparatus moving the camera probe relative to the object along an inspection path and b) for at least one period as the camera probe moves along the inspection path: turning at least a part of the camera probe about the at least one axis thereby slowing the passage of a feature of interest on the object across the camera probe's field of view; and capturing at least one image of the feature of interest during at least a portion of the turning.

主权项

1. A method of inspecting an object with a camera probe for capturing an image of an object, the camera probe and object being movable relative to each other by a measurement apparatus, at least a part of the camera probe being rotatable about at least one axis, the method comprising:
a) the measurement apparatus moving the camera probe and the object relative to each other; and b) for at least one period during said relative movement turning at least a part of the camera probe about the at least one axis thereby slowing the passage of a feature of interest on the object across the camera probe's field of view, and capturing at least one image of the feature of interest during at least a portion of said turning.