| 摘要 |
A chemical coating device includes: a cleaning solution transfer member positioned on a base plate and capable of transferring a cleaning solution; a cleaning solution injection nozzle disposed in a lower portion of the cleaning solution transfer member; a cover member disposed in a lower portion and both side portions of the base plate and covering the cleaning solution injection nozzle; and a double slit nozzle connected through a connecting member to the base plate in a front end portion of the cleaning solution transfer member and capable of discharging the cleaning solution and a chemical. The double slit nozzle includes: a chemical slit nozzle unit having a chemical discharge path guiding the chemical to a slit discharge port and discharging the chemical to the outside; a cleaning solution slit nozzle unit positioned on one side of the chemical slit nozzle unit, having a cleaning solution discharge path guiding the cleaning solution into the slit discharge port, and cleaning an inside of the slit discharge port; and a slit nozzle coupling unit coupling the chemical slit nozzle unit and the cleaning solution slit nozzle unit. |
