主权项 |
1. An integrated gas sensor (1) having a gas sensing element (21), comprising:
a substrate (2) including semiconductor material; and a structure of interconnection layers (8), arranged above the substrate (2) and including a number of stacked conductive layers (9, 10, 11) and dielectric layers (13), wherein the gas sensing element (21) is integrated within the structure of interconnection layers (8), and at least one electrode (22a, 22b) is provided within the structure of interconnection layers (8), electrically connected to the gas sensing element (21) and designed to provide an electric current (Iox) to the gas sensing element (21) in order to cause heating thereof. |