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发明名称
DEFECT INSPECTION DEVICE
摘要
申请公布号
JPH0476936(A)
申请公布日期
1992.03.11
申请号
JP19900189356
申请日期
1990.07.19
申请人
TOSHIBA CORP
发明人
YANASE TOSHINOBU
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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