| 摘要 |
At least one substrate, a front substrate (11) or a rear substrate, is opposed to a processing electrode (34, 36) in a vacuum atmosphere, and an electric field is applied between the at least one substrate and the processing electrode (34, 36), whereby the substrate is electric field-processed. After the electric field processing, the front substrate (11) and the rear substrate kept in the vacuum atmosphere are sealed together to form an envelope. The electric field processing can remove foreign matter, projections, etc. that are left on the substrate, thereby eliminating causes of generation of electric discharge. <IMAGE>
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