| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a machining device that can remove dust even if the dust scatters from respective movable parts etc., of the machining device. <P>SOLUTION: There is provided the machining device including a chuck table mechanism 5 moving a chuck table 52 holding a workpiece to a workpiece carry-in/out region and a machining region, and a cutting tool 33 for grinding a workpiece, the machining device having air flowing-out means 65 arranged. The air flowing-out means is characterized in that a partition wall 61 arranged among a clean room workpiece carry-in/out region, a first cassette mounting region, and a second cassette mounting region, and having a gap 611 allowing the workpiece to move at a lower part, a top wall 62 including a chuck table mechanism 5 with a chuck table 52 and a cutting tool 33 for turning the workpiece, and sidewalls 63, 64 covering an outer peripheral lower side of the top wall 62 with the partition wall 61 form an air flow chamber 6, the top wall 62 is provided with an air introduction opening 621, and a suction port 651 is provided nearby a machining region. <P>COPYRIGHT: (C)2013,JPO&INPIT |
