| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive cloth excellent in a polishing rate and surface roughness property of a surface to be polished.SOLUTION: An abrasive cloth comprises a flexible plastic sheet including a polishing surface to polish a surface to be polished. A total elastic modulus, which is an elastic modulus in a direction perpendicular to the polishing surface of the abrasive cloth, is 4300 gf/cmor less. In the flexible plastic sheet, the elastic modulus in a direction perpendicular to the polishing surface of the abrasive cloth, is getting greater as a portion thereof is getting further from the polishing surface in a direction perpendicular to the polishing surface.SELECTED DRAWING: Figure 1 |
