Sensor, object positioning system, lithographic apparatus and device device manufacturing method.

摘要

The invention relates to a sensor (SE) comprising two shear-mode piezoelectric transducers (TR1, TR2), wherein each piezoelectric transducer comprises a bottom surface (BS) and a top surface (TS), wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces are configured to be attached to an object (OB) to be measured.