| 发明名称 |
MICROPLASMA JET DEVICE, LAMINATED MICROPLASMA JET MODULE AND METHOD FOR MANUFACTURING MICROPLASMA JET DEVICE |
| 摘要 |
A microplasma jet device, according to the present invention, comprises: a channel layer having a plurality of micro flow channels arranged in parallel so as to enable a gas for generating plasma to pass therethrough; a first insulating layer joined to one surface of the channel layer and having a first plasma generation electrode; and a second insulating layer joined to the other surface of the channel layer and having a second plasma generation electrode. |
| 申请公布号 |
US2016219687(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201415025842 |
申请日期 |
2014.10.01 |
| 申请人 |
AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION |
发明人 |
YANG Sang Sik;KIM Kang Il;LEE Chang Min |
| 分类号 |
H05H1/24;H01J37/32 |
主分类号 |
H05H1/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microplasma jet device, comprising:
a channel layer having a plurality of microfluidic channels arranged in parallel so as to enable a gas for generating plasma to pass therethrough, are formed; a first insulating layer bonded to one surface of the channel layer and in which a first plasma generation electrode is formed; and a second insulating layer bonded to another surface of the channel layer and in which a second plasma generation electrode is formed. |
| 地址 |
Suwon-si, Gyeonggi-do KR |
