CHEMICALLY AMPLIFIED POLYMER HAVING PENDANT GROUP WITH MALONATE, METHOD FOR PREPARING THEREOF AND PHOTO RESIST COMPOSITION COMPRISING THE SAME

摘要

PURPOSE: A (meth)acrylic or norbornene carboxylate compound with a pendant group is provided to improve resolution and to increase diffusion control ability to amine and acid. CONSTITUTION: A method for preparing malonic acid alkyl ester 2,2,2-trifluoro-1-((2-alkyl)-bicyclo[2.2.1]-5-hept-5-en-2-ylmethyl)-1-trifluoromethyl-ethyl ester represented by chemical formula 2 comprises a step for performing Diels-Alder reaction of malonic acid alkyl ester (3-alkyl)-1,1-bis-trifluoromethyl-but-3-enyl ester represented by chemical formula 1 with cyclopentadiene.