OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE

摘要

An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.

主权项

1. An apparatus comprising:
an illumination source that produces a first light beam; a first lens system that causes the first light beam to be incident on a surface of a sample as a first illumination line orientated along a first direction, the first illumination line being incident on the sample at a first angle of incidence, wherein the sample emits photoluminescence light in response to excitation caused by the first light beam along the first illumination line; a second illumination source; a second lens system that focuses light emitted by the second illumination source onto the sample as a second illumination line orientated along the second direction and that is overlaid on the first illumination line on the surface of the sample and that is incident on the sample at a second angle of incidence that is different than the first angle of incidence; a stage for providing relative movement between the sample and first and second illumination lines in a second direction that is different than the first direction; a detector that collects reflected light from the second illumination line and receives the photoluminescence light emitted by the sample along the first illumination line; and a processor coupled to the detector and configured to a characteristic of the sample for a plurality of positions on the surface of the sample using the photoluminescence light and the reflected light.