| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-sensitivity thermal infrared sensor that forms an absorber for absorbing a specific wavelength on an infrared ray detection part instead of an optical filter and prevents absorption of infrared rays other than the specific wavelength.SOLUTION: An infrared sensor for detecting infrared rays at a specific wavelength includes: a) a package 10; b) an infrared ray detection element that is disposed on the package 10, includes a temperature detection part 54 and an absorber 70 that is provided on the temperature detection part 54 and absorbs infrared rays at a specific wavelength, and converts infrared rays at a specific wavelength to heat to detect the infrared rays; and c) and a lid part 30 that is disposed on the package 10 so as to cover the infrared ray detection element, and includes a body part 31 that has a front and a rear, and transmits infrared rays, and a shielding film 32 provided on at least one of the front and back of the body part 31 so as to shield infrared rays while allowing a window part 33 to remain. All of the infrared rays transmitted through the window part 33 of the lid part 30 impinge on the absorber 70.SELECTED DRAWING: Figure 4 |
