| 摘要 |
PROBLEM TO BE SOLVED: To make a continuous titanium oxide membrane having stable membrane performance at a high speed by forming a thin titanium oxide membrane on a plastic film by the vapor-deposition of titanium oxide through plasma in an oxygen atmosphere. SOLUTION: Metallic titanium (006) held in a crucible (007) placed in the lower part of a vacuum chamber (001) of 1×10-5 Torr or below degree of vacuum is evaporated by electron beams emitted from an electron gun (008), the evaporated particles (011) pass through the plasma area of oxygen introduced from a gas introduction port (010) between a plastic film (002) and the crucible (007), and a titanium oxide membrane is formed on the plastic film (002). The film (002) is supplied onto an RF coil (009) supplied from a feeder (003) along a cleaning can (005), and the titanium oxide membrane is formed here.
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