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发明名称
Improved method and apparatus for direct probe sensing
摘要
申请公布号
EP0919817(A3)
申请公布日期
2002.01.02
申请号
EP19980403006
申请日期
1998.12.01
申请人
ELECTROGLAS, INC.
发明人
KAPLAN, RUSSELL;SCHERP, RALPH;BOYLE, TIMOTHY J.
分类号
G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/06
代理机构
代理人
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