Failure analysis device and failure analysis method

摘要

A failure analysis device is provided which can realize automatic light emission analysis even when the tested chips have logic LSIs etc. fabricated therein. A comparator (11) compares individual Iddq values (I1) to (In) sequentially provided from a probe card (3) with a threshold (Ith1) provided from a main control unit (7). An abnormality occurrence vector specifying unit (8) receives data (D2) about the results of comparison from the comparator (11) and specifies an abnormality occurrence vector or vectors from among a plurality of test vectors (TB1) to (TBn) on the basis of the data (D2). More specifically, the abnormality occurrence vector specifying unit (8) specifies the test vector as the abnormality occurrence vector when the corresponding detected Iddq value is larger than the threshold (Ith1).