| 摘要 |
PROBLEM TO BE SOLVED: To provide pre-aligner equipment wherein notch detection mistake to tolerance and eccentricity of a wafer is eliminated, a notch can be detected certainly and sensor position adjustment is simple. SOLUTION: The pre-aligner equipment is provided with a wafer holding rolling mechanism which holds the wafer W on a table 1 and rotates it, a notch detection sensor 5 which consists of a light casting apparatus 5a which casts light to a peripheral part of the wafer W, and a photodetector 5b which receives the light at a notch position of the wafer W. In the pre-aligner equipment, diameter of a shaft of light of the photodetector 5b is made smaller than width of a notch opening portion. A sensor anchor block 6 is arranged as independent of the wafer holding rolling mechanism and fixes the notch detection sensor 5. A linear motor 7 performs rectilinear movement of the notch detection sensor 5 to radial direction of the wafer W. A pre-alignment controller 9 having notch positioning function controls the wafer holding rolling mechanism and the linear motor 7, calculates rotation position of the notch 8 from a signal of the notch detection sensor 5, and arranges the notch 8 at a prescribed position are installed. COPYRIGHT: (C)2005,JPO&NCIPI |
