| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which prevents a reduction of deformation characteristics or incapability of control, and provide a piezoelectric pump that uses the same and an ink jet head. <P>SOLUTION: In the piezoelectric actuator, a surface electrode 6 is formed on a main face of a piezoelectric ceramic layer 5 in a laminate obtained by laminating the piezoelectric ceramic layer 5, an internal electrode layer 4, and a vibrating plate 2, in this order; and a conductive DLC film is formed as conductive layers 9, 9b for shutting off an electric field is formed on the main face and a side face of the vibrating plate 2, and the conductive layers 9, 9b for shielding the electric field are electrically connected to the internal electrode layer 4. The ink jet head comprises a piezoelectric actuator 1, and an ink flow path member 3 provided with a ink pressure chamber 3a interconnected with an ink supply path and an ink outlet 8. The conductive layer 9 for shielding the electric field of the piezoelectric actuator 1 constitutes a part of a wall face of the ink pressure chamber 3a, and an ink is delivered from the ink flow path member 3 by the vibrations of the piezoelectric actuator 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
